IM.1.P033 Mapping strain fields in semiconductor nanodevices by dark-field off-axis electron holography and nano-beam diffraction

Sickmann, J., Geisler, H., Würfel, A., Engelmann, H.-J., Lichte, H..

Keywords: dark-field holography, nano-beam diffraction, strain mapping

Subjects: Instrumentation and Methods (IM)

URN: urn:nbn:de:bvb:355-mc2013-393-9

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