IM.3.P071 Multifunctional tool FIB-SEM-SPM and its application for electron and ion beam lithography

Jiruse, J., Lencova, B., Rudolf, M., Bartosik, M., Liskova, Z., Neuman, J., Sikola, T.
Keywords: FIB-SEM, SPM, electron beam lithography, ion beam lithography

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