IM.4.P099 Energy-filtered transmission electron microscopy: a tool to characterize side-wall damage in the low-k inter-metal dielectric

Singh, P., Zimmermann, S., Waechtler, T., Schulze, S., Schulz, S., Hietschold, M.

Subjects: Instrumentation and Methods (IM)

URN: urn:nbn:de:bvb:355-mc2013-460-7

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