IM.5.105 Charging process simulation of PMMA film on Si substrate irradiated by electron beam

Kotera, M., Otani, M., Hosoi, S., Kumagai, M.
Keywords: Monte Carlo simulation of electron trajectories, PMMA film, charging process simulation
Subjects: Instrumentation and Methods (IM)
URN: urn:nbn:de:bvb:355-mc2013-466-9

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