IM.5.P114 Measurement of the electrostatic potential distribution in an in-situ biased p-type silicon field effect transistor using the combination of a Nanofactory-TEM-holder and Electron Holography

Lenk, A., Börrnert, F., Sturm, S., Wolf, D., Röder, F., Lubk, A., Lichte, H.
Keywords: In-situ Biasing, Dopant Profiling, Electron Holography

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