IM.6.117 STEM-EDX nano-tomography in a TEM

Lepinay, K., Lorut, F., Pantel, R., Epicier, T.
Keywords: nano-tomography, STEM-EDX, chemical 3D, CMOS transistor, microelectronic, nanowire
Subjects: Instrumentation and Methods (IM)
URN: urn:nbn:de:bvb:355-mc2013-478-5

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