IM.6.P136 A compact solution for Eucentric Positioning inside the FIB/SEM

Kleindiek, S., Schock, K., Zaefferer, S.
Keywords: eucentric, tilting, EBSD, ECCI, SEM, FIB
Subjects: Instrumentation and Methods (IM)
URN: urn:nbn:de:bvb:355-mc2013-497-6

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