IM.7.139 Combining laser and focussed ion-beam micromachining: Target preparation to large depths and at high ablation rates

Ebert, M., Krause, M., Höche, T.

Keywords: focussed ion beam, laser machining, material science

Subjects: Instrumentation and Methods (IM)

URN: urn:nbn:de:bvb:355-mc2013-500-1

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