MS.3.P048 TEM observations on different length scales for characterization of AlN texture and columnar growth

Schürmann, U., Hrkac, V., Marauska, S., Petraru, A., Duppel, V., Chakravadhanula, V. S. K., Kübel, C., Wagner, B., Kohlstedt, H., Kienle, L.
Keywords: piezoelectric material, AlN, HRTEM, ACOM

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