MS.3.P058 Estimation of medium-range strain in 3D-stacked silicon-based integrated circuits using energy filtered CBED
Muehle, U.
,
Gall, M.
,
Ritz, Y.
,
Sukharev, V.
,
Zschech, E.
Subjects
:
Materials Science (MS)
URN
:
urn:nbn:de:bvb:355-mc2013-598-7
PDF
Download (139Kb)
Creative Commons: Attribution 3.0