MS.3.P071 Analysis of crystal orientation in AlN layers grown on m-plane sapphire

Mogilatenko, A., Stellmach, J., Frentrup, M., Mehnke, F., Wernicke, T., Kneissl, M., Weyers, M.
Keywords: scanning nanobeam diffraction, III-nitrides, semipolar layers
Subjects: Materials Science (MS)
URN: urn:nbn:de:bvb:355-mc2013-611-6

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