MS.5.P121 Strain analysis of buried AlAs/oxide stressor layers by dark field holography

Kießling, F., Niermann, T., Schulze, J.-H., Strittmatter, A., Pohl, U. W., Lehmann, M.
Keywords: transmission electron microscopy, dark field holography, strain analysis
Subjects: Materials Science (MS)
URN: urn:nbn:de:bvb:355-mc2013-661-2

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