MS.5.P133 NixGey films synthetized by LPCVD using Ge2Me6 and Et3GeH precursors
Klementova, M.
,
Novotný, F.
,
Fajgar, R.
,
Dřínek, V.
Subjects
:
Materials Science (MS)
URN
:
urn:nbn:de:bvb:355-mc2013-673-8
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