MS.5.P143 Nanoscale masking with UV excimer laser for bit patterned media

Szívós, J., Sáfrán, G., Serényi, M., Gergely-Fülöp, E.
Keywords: thin films, patterning, nanoscale structures, nano-mask fabrication
Subjects: Materials Science (MS)
URN: urn:nbn:de:bvb:355-mc2013-683-4

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