MS.5.P144 Polycrystalline to single crystalline, ALD deposited ZnO layers

Pecz, B., Baji, Z., Lábadi, Z., Kovacs, A.
Keywords: ZnO, atomic layer deposition, transmission electron microscopy
Subjects: Materials Science (MS)
URN: urn:nbn:de:bvb:355-mc2013-684-9

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