MS.5.P151 Characterization and optimization of a barium titanate deposition process for fabrication of capacitive microelectrodes

Röhler, S., Schröppel, B., Burkhardt, C. J., Stett, A., Kern, D. P.

Subjects: Materials Science (MS)

URN: urn:nbn:de:bvb:355-mc2013-691-4

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