IM.5.P112 Measurements of surface potential distribution at FEP resist film on a conductive substrate irradiated by electron beam

Kumagai, K., Otani, M., Hosoi, S., Kotera, M.

Keywords: electrostatic force microscopy, charging of insulators, surface potential distribution

Subjects: Instrumentation and Methods (IM)

URN: urn:nbn:de:bvb:355-mc2013-473-8

Preview

PDF Download (162Kb) Creative Commons: Attribution 3.0

---

---

---

Proceedings MC 2013 is powered by EPrints 3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.

• Login
• Create Account