IM.7.P154 Focused Ion Beam nanofabrication employing multiple Ion Species from Liquid Metal Alloy Ion Sources

Bauerdick, S., Nadzeyka, A., Mazarov, P., Bruchhaus, L., Jede, R.
Keywords: FIB, ion source, nanofabrication
Subjects: Instrumentation and Methods (IM)
URN: urn:nbn:de:bvb:355-mc2013-514-7

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