LBP.IM.P07 Strain measurement of semiconductor device by moiré fringes in STEM
Kondo, Y.
,
Endo, N.
Subjects
:
Instrumentation and Methods (IM)
URN
:
urn:nbn:de:bvb:355-mc2013-520-1
Preview
PDF
Download (181Kb)
Creative Commons: Attribution 3.0