MS.3.P054 Characterization of laser-deposited Ge-Sb-Te thin films by Cscorrected STEM

Roß, U., Lotnyk, A., Thelander, E., Rauschenbach, B.
Keywords: phase-change materials, STEM, Cs-correction
Subjects: Materials Science (MS)
URN: urn:nbn:de:bvb:355-mc2013-594-5

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