MS.5.P139 Silicon nanostructures produced by self-masked plasma etching

Barucca, G., Santecchia, E., Mengucci, P., Tiberi, E., Di Mundo, R., d'Agostino, R., Palumbo, F.

Keywords: silicon nanostructures, plasma etching, transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS)

Subjects: Materials Science (MS)

URN: urn:nbn:de:bvb:355-mc2013-679-5

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